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Investigation of the mechanical bending and frequency shift induced by adsorption and temperature using micro- and nanocantilever sensors

The marked progress in MEMS/NEMS technology has demanded the development of a fundamental understanding of cantilever-based sensing principles. One of the challenges of cantilever-based detection is identifying and discerning the most influenced parameters responsible for the observed changes in the... Full description

Journal Title: Journal of Applied Physics 01 July 2012, Vol.112(1)
Main Author: Feng, Lu
Other Authors: Gao, Fengling , Liu, Meihua , Wang, Shibin , Li, Linan , Shen, Min , Wang, Zhiyong
Format: Electronic Article Electronic Article
Language: English
Subjects:
ID: ISSN: 0021-8979 ; E-ISSN: 1089-7550 ; DOI: 10.1063/1.4730917
Link: http://dx.doi.org/10.1063/1.4730917
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recordid: aip_complete10.1063/1.4730917
title: Investigation of the mechanical bending and frequency shift induced by adsorption and temperature using micro- and nanocantilever sensors
format: Article
creator:
  • Feng, Lu
  • Gao, Fengling
  • Liu, Meihua
  • Wang, Shibin
  • Li, Linan
  • Shen, Min
  • Wang, Zhiyong
subjects:
  • Articles
ispartof: Journal of Applied Physics, 01 July 2012, Vol.112(1)
description: The marked progress in MEMS/NEMS technology has demanded the development of a fundamental understanding of cantilever-based sensing principles. One of the challenges of cantilever-based detection is identifying and discerning the most influenced parameters responsible for the observed changes in the cantilever response. For example, effects of various force fields such as those induced by atom/molecular adsorption and variations in temperature may occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of sensors. In this paper, we, therefore, systematically investigate the interplay between these two distinctly different mechanisms and attendant mechanical response. To this end, a theory model is proposed to predict the mechanical bending and resonance frequency shift of micro- and nanocantilevers taking into account atom/molecular adsorption and variations in temperature at the same time. The adsorption induced mechanical responses of microcantilevers are modeled for the van der Waals interaction in presence of surface effect. Thermal effects addressed here include the thermal mismatch between the substrate and coating layer owing to different thermal expansion coefficients and the temperature-dependent material properties. The theoretical and computational model developed here will allow one to gain an insight into not only the mechanical responses observed experimentally but also the fundamental, novel detection principles for sensing applications.
language: eng
source:
identifier: ISSN: 0021-8979 ; E-ISSN: 1089-7550 ; DOI: 10.1063/1.4730917
fulltext: fulltext
issn:
  • 0021-8979
  • 1089-7550
  • 00218979
  • 10897550
url: Link


@attributes
ID841636692
RANK0.07
NO1
SEARCH_ENGINEprimo_central_multiple_fe
SEARCH_ENGINE_TYPEPrimo Central Search Engine
LOCALfalse
PrimoNMBib
record
control
sourcerecordid10.1063/1.4730917
sourceidaip_complete
recordidTN_aip_complete10.1063/1.4730917
sourcesystemOther
galeid302914400
display
typearticle
titleInvestigation of the mechanical bending and frequency shift induced by adsorption and temperature using micro- and nanocantilever sensors
creatorFeng, Lu ; Gao, Fengling ; Liu, Meihua ; Wang, Shibin ; Li, Linan ; Shen, Min ; Wang, Zhiyong
ispartofJournal of Applied Physics, 01 July 2012, Vol.112(1)
subjectArticles
descriptionThe marked progress in MEMS/NEMS technology has demanded the development of a fundamental understanding of cantilever-based sensing principles. One of the challenges of cantilever-based detection is identifying and discerning the most influenced parameters responsible for the observed changes in the cantilever response. For example, effects of various force fields such as those induced by atom/molecular adsorption and variations in temperature may occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of sensors. In this paper, we, therefore, systematically investigate the interplay between these two distinctly different mechanisms and attendant mechanical response. To this end, a theory model is proposed to predict the mechanical bending and resonance frequency shift of micro- and nanocantilevers taking into account atom/molecular adsorption and variations in temperature at the same time. The adsorption induced mechanical responses of microcantilevers are modeled for the van der Waals interaction in presence of surface effect. Thermal effects addressed here include the thermal mismatch between the substrate and coating layer owing to different thermal expansion coefficients and the temperature-dependent material properties. The theoretical and computational model developed here will allow one to gain an insight into not only the mechanical responses observed experimentally but also the fundamental, novel detection principles for sensing applications.
languageeng
source
identifier
version3
lds50peer_reviewed
links
openurl$$Topenurl_article
backlink$$Uhttp://dx.doi.org/10.1063/1.4730917$$EView_source_record
openurlfulltext$$Topenurlfull_article
search
creatorcontrib
0Feng, Lu
1Gao, Fengling
2Liu, Meihua
3Wang, Shibin
4Li, Linan
5Shen, Min
6Wang, Zhiyong
titleInvestigation of the mechanical bending and frequency shift induced by adsorption and temperature using micro- and nanocantilever sensors
subjectArticles
general
0English
1© 2012 American Institute of Physics (AIP)
2American Institute of Physics
3AIP Journals
410.1063/1.4730917
sourceidaip_complete
recordidaip_complete10.1063/1.4730917
issn
00021-8979
11089-7550
200218979
310897550
rsrctypearticle
searchscopeaip_journals
scopeaip_journals
descriptionThe marked progress in MEMS/NEMS technology has demanded the development of a fundamental understanding of cantilever-based sensing principles. One of the challenges of cantilever-based detection is identifying and discerning the most influenced parameters responsible for the observed changes in the cantilever response. For example, effects of various force fields such as those induced by atom/molecular adsorption and variations in temperature may occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of sensors. In this paper, we, therefore, systematically investigate the interplay between these two distinctly different mechanisms and attendant mechanical response. To this end, a theory model is proposed to predict the mechanical bending and resonance frequency shift of micro- and nanocantilevers taking into account atom/molecular adsorption and variations in temperature at the same time. The adsorption induced mechanical responses of microcantilevers are modeled for the van der Waals interaction in presence of surface effect. Thermal effects addressed here include the thermal mismatch between the substrate and coating layer owing to different thermal expansion coefficients and the temperature-dependent material properties. The theoretical and computational model developed here will allow one to gain an insight into not only the mechanical responses observed experimentally but also the fundamental, novel detection principles for sensing applications.
creationdate2012
startdate20120701
enddate20120701
addtitleJournal of Applied Physics
lsr40Journal of Applied Physics, 01 July 2012, Vol.112 (1)
citationvol 112 issue 1
lsr30VSR-Enriched:[galeid]
sort
titleInvestigation of the mechanical bending and frequency shift induced by adsorption and temperature using micro- and nanocantilever sensors
authorFeng, Lu ; Gao, Fengling ; Liu, Meihua ; Wang, Shibin ; Li, Linan ; Shen, Min ; Wang, Zhiyong
creationdate20120701
lso0120120701
facets
frbrgroupid4541636960137466242
frbrtype5
languageeng
creationdate2012
topicArticles
collectionAIP Journals
prefilterarticles
rsrctypearticles
creatorcontrib
0Feng, Lu
1Gao, Fengling
2Liu, Meihua
3Wang, Shibin
4Li, Linan
5Shen, Min
6Wang, Zhiyong
jtitleJournal of Applied Physics
toplevelpeer_reviewed
delivery
delcategoryRemote Search Resource
fulltextfulltext
addata
aulast
0Feng
1Gao
2Liu
3Wang
4Li
5Shen
aufirstLu ; Fengling ; Meihua ; Shibin ; Linan ; Min ; Zhiyong
auinitL
au
0Feng, Lu
1Gao, Fengling
2Liu, Meihua
3Wang, Shibin
4Li, Linan
5Shen, Min
6Wang, Zhiyong
atitleInvestigation of the mechanical bending and frequency shift induced by adsorption and temperature using micro- and nanocantilever sensors
jtitleJournal of Applied Physics
stitleJ. Appl. Phys.
risdate20120701
volume112
issue1
issn0021-8979
eissn1089-7550
formatjournal
genrearticle
ristypeJOUR
abstractThe marked progress in MEMS/NEMS technology has demanded the development of a fundamental understanding of cantilever-based sensing principles. One of the challenges of cantilever-based detection is identifying and discerning the most influenced parameters responsible for the observed changes in the cantilever response. For example, effects of various force fields such as those induced by atom/molecular adsorption and variations in temperature may occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of sensors. In this paper, we, therefore, systematically investigate the interplay between these two distinctly different mechanisms and attendant mechanical response. To this end, a theory model is proposed to predict the mechanical bending and resonance frequency shift of micro- and nanocantilevers taking into account atom/molecular adsorption and variations in temperature at the same time. The adsorption induced mechanical responses of microcantilevers are modeled for the van der Waals interaction in presence of surface effect. Thermal effects addressed here include the thermal mismatch between the substrate and coating layer owing to different thermal expansion coefficients and the temperature-dependent material properties. The theoretical and computational model developed here will allow one to gain an insight into not only the mechanical responses observed experimentally but also the fundamental, novel detection principles for sensing applications.
pubAmerican Institute of Physics
doi10.1063/1.4730917
date2012-07-01