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Investigation of Nano/Microcrystalline Diamond Composite Films for Thermal Applications

A newly developed nano/microcrystalline diamond composite film for thermal applications was prepared in this investigation. A microcrystalline diamond (MCD) film was deposited onto silicon substrate by hot filament chemical vapor deposition (HFCVD) method, and then a nanocrystalline diamond (NCD) fi... Full description

Journal Title: Materials science forum 2009-01-02, Vol.610-613, p.563-566
Main Author: Wang, Lin Jun
Other Authors: Xia, Yi Ben , Huang, Jian , Lai, Jian Ming , Tang, Ke , Guan, Yu Lan , Dai, Wen Qi
Format: Electronic Article Electronic Article
Language: English
ID: ISSN: 0255-5476
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recordid: cdi_crossref_primary_10_4028_www_scientific_net_MSF_610_613_563
title: Investigation of Nano/Microcrystalline Diamond Composite Films for Thermal Applications
format: Article
creator:
  • Wang, Lin Jun
  • Xia, Yi Ben
  • Huang, Jian
  • Lai, Jian Ming
  • Tang, Ke
  • Guan, Yu Lan
  • Dai, Wen Qi
ispartof: Materials science forum, 2009-01-02, Vol.610-613, p.563-566
description: A newly developed nano/microcrystalline diamond composite film for thermal applications was prepared in this investigation. A microcrystalline diamond (MCD) film was deposited onto silicon substrate by hot filament chemical vapor deposition (HFCVD) method, and then a nanocrystalline diamond (NCD) film was grown onto this MCD film to obtain a NCD/MCD composite film. The root-mean-square (RMS) value of surface roughness for the composite film estimated from the atomic force microscope image was 42.7nm. Compared with 85.9nm for the MCD film. And it was also found that the thermal diffusivity increased from 32.61mm2/s to 37.63mm2/s by further growing a NCD film. Results indicated that the deposition of NCD film reduced the rough surface of the MCD film with grain sizes of the order of microns, and thus increased the efficiency of diamond films as thermal spreading device. It was found that the NCD/MCD composite film had a smoother surface and a higher thermal diffusivity compared with MCD film.
language: eng
source:
identifier: ISSN: 0255-5476
fulltext: no_fulltext
issn:
  • 0255-5476
  • 1662-9752
  • 1662-9752
url: Link


@attributes
NO1
SEARCH_ENGINEprimo_central_multiple_fe
SEARCH_ENGINE_TYPEPrimo Central Search Engine
RANK2.0415177
LOCALfalse
PrimoNMBib
record
control
sourceidproquest_cross
recordidTN_cdi_crossref_primary_10_4028_www_scientific_net_MSF_610_613_563
sourceformatXML
sourcesystemPC
sourcerecordid34291967
originalsourceidFETCH-LOGICAL-c2123-73dd0dc2846c6af220f325ef1a8798e3637c6e5c5f89c0f565a2d6e1922215910
addsrcrecordideNqVkE9LwzAYh4MoOKffoScPQrv8adL2ODenA6cHJx5DSBOX0SY1yRz79kYnePbw8l5-PPA8ANwgWJQQ15P9fl8EaZSNRhtZWBUnq5dFwRDMGSIFZeQEjBBjOG8qik_BCGJKc1pW7BxchLCFkKAasRF4W9pPFaJ5F9E4mzmdPQnrJisjvZP-EKLoOmNVNjeid7bNZq4fXDBRZQvT9SHTzmfrjfK96LLpMHRG_oDCJTjTogvq6vePwevibj17yB-f75ez6WMuMcIkr0jbwlbiumSSCY0x1ARTpZGoq6ZWhJFKMkUl1XUjoaaMCtwyhRqMMaINgmNwfeQO3n3skgnvTZCq64RVbhc4KXGDGlal4e1xmMRC8ErzwZte-ANHkH835akp_2vKU1OemvLUNB3hqWmCzI-Q6IUNUckN37qdt8nwP5gvng2K_w
sourcetypeAggregation Database
isCDItrue
recordtypearticle
pqid34291967
display
typearticle
titleInvestigation of Nano/Microcrystalline Diamond Composite Films for Thermal Applications
creatorWang, Lin Jun ; Xia, Yi Ben ; Huang, Jian ; Lai, Jian Ming ; Tang, Ke ; Guan, Yu Lan ; Dai, Wen Qi
creatorcontribWang, Lin Jun ; Xia, Yi Ben ; Huang, Jian ; Lai, Jian Ming ; Tang, Ke ; Guan, Yu Lan ; Dai, Wen Qi
descriptionA newly developed nano/microcrystalline diamond composite film for thermal applications was prepared in this investigation. A microcrystalline diamond (MCD) film was deposited onto silicon substrate by hot filament chemical vapor deposition (HFCVD) method, and then a nanocrystalline diamond (NCD) film was grown onto this MCD film to obtain a NCD/MCD composite film. The root-mean-square (RMS) value of surface roughness for the composite film estimated from the atomic force microscope image was 42.7nm. Compared with 85.9nm for the MCD film. And it was also found that the thermal diffusivity increased from 32.61mm2/s to 37.63mm2/s by further growing a NCD film. Results indicated that the deposition of NCD film reduced the rough surface of the MCD film with grain sizes of the order of microns, and thus increased the efficiency of diamond films as thermal spreading device. It was found that the NCD/MCD composite film had a smoother surface and a higher thermal diffusivity compared with MCD film.
identifier
0ISSN: 0255-5476
1ISSN: 1662-9752
2EISSN: 1662-9752
3DOI: 10.4028/www.scientific.net/MSF.610-613.563
languageeng
ispartofMaterials science forum, 2009-01-02, Vol.610-613, p.563-566
rights2009 Trans Tech Publications Ltd
lds50peer_reviewed
links
openurl$$Topenurl_article
thumbnail$$Uhttps://www.scientific.net/Image/TitleCover/803?width=600
search
creatorcontrib
0Wang, Lin Jun
1Xia, Yi Ben
2Huang, Jian
3Lai, Jian Ming
4Tang, Ke
5Guan, Yu Lan
6Dai, Wen Qi
title
0Investigation of Nano/Microcrystalline Diamond Composite Films for Thermal Applications
1Materials science forum
descriptionA newly developed nano/microcrystalline diamond composite film for thermal applications was prepared in this investigation. A microcrystalline diamond (MCD) film was deposited onto silicon substrate by hot filament chemical vapor deposition (HFCVD) method, and then a nanocrystalline diamond (NCD) film was grown onto this MCD film to obtain a NCD/MCD composite film. The root-mean-square (RMS) value of surface roughness for the composite film estimated from the atomic force microscope image was 42.7nm. Compared with 85.9nm for the MCD film. And it was also found that the thermal diffusivity increased from 32.61mm2/s to 37.63mm2/s by further growing a NCD film. Results indicated that the deposition of NCD film reduced the rough surface of the MCD film with grain sizes of the order of microns, and thus increased the efficiency of diamond films as thermal spreading device. It was found that the NCD/MCD composite film had a smoother surface and a higher thermal diffusivity compared with MCD film.
issn
00255-5476
11662-9752
21662-9752
fulltextfalse
rsrctypearticle
creationdate2009
recordtypearticle
recordideNqVkE9LwzAYh4MoOKffoScPQrv8adL2ODenA6cHJx5DSBOX0SY1yRz79kYnePbw8l5-PPA8ANwgWJQQ15P9fl8EaZSNRhtZWBUnq5dFwRDMGSIFZeQEjBBjOG8qik_BCGJKc1pW7BxchLCFkKAasRF4W9pPFaJ5F9E4mzmdPQnrJisjvZP-EKLoOmNVNjeid7bNZq4fXDBRZQvT9SHTzmfrjfK96LLpMHRG_oDCJTjTogvq6vePwevibj17yB-f75ez6WMuMcIkr0jbwlbiumSSCY0x1ARTpZGoq6ZWhJFKMkUl1XUjoaaMCtwyhRqMMaINgmNwfeQO3n3skgnvTZCq64RVbhc4KXGDGlal4e1xmMRC8ErzwZte-ANHkH835akp_2vKU1OemvLUNB3hqWmCzI-Q6IUNUckN37qdt8nwP5gvng2K_w
startdate20090102
enddate20090102
creator
0Wang, Lin Jun
1Xia, Yi Ben
2Huang, Jian
3Lai, Jian Ming
4Tang, Ke
5Guan, Yu Lan
6Dai, Wen Qi
scope
0AAYXX
1CITATION
27SR
38BQ
48FD
5JG9
sort
creationdate20090102
titleInvestigation of Nano/Microcrystalline Diamond Composite Films for Thermal Applications
authorWang, Lin Jun ; Xia, Yi Ben ; Huang, Jian ; Lai, Jian Ming ; Tang, Ke ; Guan, Yu Lan ; Dai, Wen Qi
facets
frbrtype5
frbrgroupidcdi_FETCH-LOGICAL-c2123-73dd0dc2846c6af220f325ef1a8798e3637c6e5c5f89c0f565a2d6e1922215910
rsrctypearticles
prefilterarticles
languageeng
creationdate2009
toplevelpeer_reviewed
creatorcontrib
0Wang, Lin Jun
1Xia, Yi Ben
2Huang, Jian
3Lai, Jian Ming
4Tang, Ke
5Guan, Yu Lan
6Dai, Wen Qi
collection
0CrossRef
1Engineered Materials Abstracts
2METADEX
3Technology Research Database
4Materials Research Database
jtitleMaterials science forum
delivery
delcategoryRemote Search Resource
fulltextno_fulltext
addata
au
0Wang, Lin Jun
1Xia, Yi Ben
2Huang, Jian
3Lai, Jian Ming
4Tang, Ke
5Guan, Yu Lan
6Dai, Wen Qi
formatjournal
genrearticle
ristypeJOUR
atitleInvestigation of Nano/Microcrystalline Diamond Composite Films for Thermal Applications
jtitleMaterials science forum
date2009-01-02
risdate2009
volume610-613
spage563
epage566
pages563-566
issn
00255-5476
11662-9752
eissn1662-9752
notesSelected, peer reviewed papers from MRS International Materials Research Conference, Science Technology Application Industry, June 9 - 12, 2008,Chongqing,China
abstractA newly developed nano/microcrystalline diamond composite film for thermal applications was prepared in this investigation. A microcrystalline diamond (MCD) film was deposited onto silicon substrate by hot filament chemical vapor deposition (HFCVD) method, and then a nanocrystalline diamond (NCD) film was grown onto this MCD film to obtain a NCD/MCD composite film. The root-mean-square (RMS) value of surface roughness for the composite film estimated from the atomic force microscope image was 42.7nm. Compared with 85.9nm for the MCD film. And it was also found that the thermal diffusivity increased from 32.61mm2/s to 37.63mm2/s by further growing a NCD film. Results indicated that the deposition of NCD film reduced the rough surface of the MCD film with grain sizes of the order of microns, and thus increased the efficiency of diamond films as thermal spreading device. It was found that the NCD/MCD composite film had a smoother surface and a higher thermal diffusivity compared with MCD film.
doi10.4028/www.scientific.net/MSF.610-613.563