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Research on Micromechanical Machining Technology of Micro-Flow Sensor

The development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and application... Full description

Journal Title: Applied Mechanics and Materials 2013-01-11, Vol.273, p.555-559
Main Author: Lv, Hui
Other Authors: Liu, Shi Bin
Format: Electronic Article Electronic Article
Language: English
Publisher: Zurich: Trans Tech Publications Ltd
ID: ISSN: 1660-9336
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recordid: cdi_proquest_journals_1442559641
title: Research on Micromechanical Machining Technology of Micro-Flow Sensor
format: Article
creator:
  • Lv, Hui
  • Liu, Shi Bin
ispartof: Applied Mechanics and Materials, 2013-01-11, Vol.273, p.555-559
description: The development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.
language: eng
source:
identifier: ISSN: 1660-9336
fulltext: no_fulltext
issn:
  • 1660-9336
  • 1662-7482
  • 1662-7482
url: Link


@attributes
NO1
SEARCH_ENGINEprimo_central_multiple_fe
SEARCH_ENGINE_TYPEPrimo Central Search Engine
RANK2.125239
LOCALfalse
PrimoNMBib
record
control
sourceidproquest_cross
recordidTN_cdi_proquest_journals_1442559641
sourceformatXML
sourcesystemPC
sourcerecordid3101579411
originalsourceidFETCH-LOGICAL-c2015-7bee8e8f7fc630acb7f9e057711f126aac684a477d39df02030fb6795493c9ea0
addsrcrecordideNqNkF9LwzAUxYN_wDn3HQqCb-2SJmnSF3GMTYUVQedzyLJk6-iSmXSUfXujFfTRpwv3Hs655wfAHYIZgTkfd12XBVVr29amVpnV7XhSVVnOcEYpPQMDVBR5ygjPz8GoZBxDzDilnKOL7xtMS4yLK3Adwg7CgiDCB2D2qoOWXm0TZ5OqVt7ttdpKWyvZJJVU29rWdpMs49K6xm1OiTO9Lp03rkvetA3O34BLI5ugRz9zCN7ns-X0KV28PD5PJ4tU5RDRlK205pobZlSBoVQrZkoNKWMIGZQXUqqCE0kYW-NybWAOMTSrgpWUlFiVWsIhuO19D959HHVoxc4dvY2RAhGSU1rGWlF136vilyF4bcTB13vpTwJB8YVSRJTiF6WIKEVEKSJKEVFGg4feoPXShjZ2_5PzP4tPFNCCpQ
sourcetypeAggregation Database
isCDItrue
recordtypearticle
pqid1442559641
display
typearticle
titleResearch on Micromechanical Machining Technology of Micro-Flow Sensor
creatorLv, Hui ; Liu, Shi Bin
creatorcontribLv, Hui ; Liu, Shi Bin
descriptionThe development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.
identifier
0ISSN: 1660-9336
1ISSN: 1662-7482
2ISBN: 9783037855881
3ISBN: 3037855886
4EISSN: 1662-7482
5DOI: 10.4028/www.scientific.net/AMM.273.555
languageeng
publisherZurich: Trans Tech Publications Ltd
ispartofApplied Mechanics and Materials, 2013-01-11, Vol.273, p.555-559
rights
02013 Trans Tech Publications Ltd
1Copyright Trans Tech Publications Ltd. Jan 2013
lds50peer_reviewed
citesFETCH-LOGICAL-c2015-7bee8e8f7fc630acb7f9e057711f126aac684a477d39df02030fb6795493c9ea0
links
openurl$$Topenurl_article
thumbnail$$Uhttps://www.scientific.net/Image/TitleCover/2202?width=600
search
creatorcontrib
0Lv, Hui
1Liu, Shi Bin
title
0Research on Micromechanical Machining Technology of Micro-Flow Sensor
1Applied Mechanics and Materials
descriptionThe development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.
issn
01660-9336
11662-7482
21662-7482
isbn
09783037855881
13037855886
fulltextfalse
rsrctypearticle
creationdate2013
recordtypearticle
recordideNqNkF9LwzAUxYN_wDn3HQqCb-2SJmnSF3GMTYUVQedzyLJk6-iSmXSUfXujFfTRpwv3Hs655wfAHYIZgTkfd12XBVVr29amVpnV7XhSVVnOcEYpPQMDVBR5ygjPz8GoZBxDzDilnKOL7xtMS4yLK3Adwg7CgiDCB2D2qoOWXm0TZ5OqVt7ttdpKWyvZJJVU29rWdpMs49K6xm1OiTO9Lp03rkvetA3O34BLI5ugRz9zCN7ns-X0KV28PD5PJ4tU5RDRlK205pobZlSBoVQrZkoNKWMIGZQXUqqCE0kYW-NybWAOMTSrgpWUlFiVWsIhuO19D959HHVoxc4dvY2RAhGSU1rGWlF136vilyF4bcTB13vpTwJB8YVSRJTiF6WIKEVEKSJKEVFGg4feoPXShjZ2_5PzP4tPFNCCpQ
startdate20130111
enddate20130111
creator
0Lv, Hui
1Liu, Shi Bin
generalTrans Tech Publications Ltd
scope
0AAYXX
1CITATION
27SR
37TB
48BQ
58FD
68FE
78FG
8ABJCF
9ABUWG
10BENPR
11BFMQW
12BGLVJ
13D1I
14DWQXO
15FR3
16HCIFZ
17JG9
18KB.
19KR7
20L6V
21M7S
22PDBOC
23PQEST
24PQQKQ
25PQUKI
26PRINS
27PTHSS
sort
creationdate20130111
titleResearch on Micromechanical Machining Technology of Micro-Flow Sensor
authorLv, Hui ; Liu, Shi Bin
facets
frbrtype5
frbrgroupidcdi_FETCH-LOGICAL-c2015-7bee8e8f7fc630acb7f9e057711f126aac684a477d39df02030fb6795493c9ea0
rsrctypearticles
prefilterarticles
languageeng
creationdate2013
toplevelpeer_reviewed
creatorcontrib
0Lv, Hui
1Liu, Shi Bin
collection
0CrossRef
1Engineered Materials Abstracts
2Mechanical & Transportation Engineering Abstracts
3METADEX
4Technology Research Database
5ProQuest SciTech Collection
6ProQuest Technology Collection
7Materials Science & Engineering Collection
8ProQuest Central (Alumni Edition)
9ProQuest Central
10Continental Europe Database
11Technology Collection
12ProQuest Materials Science Collection
13ProQuest Central Korea
14Engineering Research Database
15SciTech Premium Collection
16Materials Research Database
17Materials Science Database
18Civil Engineering Abstracts
19ProQuest Engineering Collection
20Engineering Database
21Materials Science Collection
22ProQuest One Academic Eastern Edition
23ProQuest One Academic
24ProQuest One Academic UKI Edition
25ProQuest Central China
26Engineering Collection
jtitleApplied Mechanics and Materials
delivery
delcategoryRemote Search Resource
fulltextno_fulltext
addata
au
0Lv, Hui
1Liu, Shi Bin
formatjournal
genrearticle
ristypeJOUR
atitleResearch on Micromechanical Machining Technology of Micro-Flow Sensor
jtitleApplied Mechanics and Materials
date2013-01-11
risdate2013
volume273
spage555
epage559
pages555-559
issn
01660-9336
11662-7482
eissn1662-7482
isbn
09783037855881
13037855886
notesSelected, peer reviewed papers from the 2nd International Conference on Innovation Manufacturing and Engineering Management (IMEM 2012), December 14-16, 2012, Chongqing, China
abstractThe development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.
copZurich
pubTrans Tech Publications Ltd
doi10.4028/www.scientific.net/AMM.273.555