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Research on Micromechanical Machining Technology of Micro-Flow Sensor

The development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and application... Full description

Journal Title: Applied Mechanics and Materials 2013-01-11, Vol.273, p.555-559
Main Author: Lv, Hui
Other Authors: Liu, Shi Bin
Format: Electronic Article Electronic Article
Language: English
Publisher: Zurich: Trans Tech Publications Ltd
ID: ISSN: 1660-9336
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title: Research on Micromechanical Machining Technology of Micro-Flow Sensor
format: Article
creator:
  • Lv, Hui
  • Liu, Shi Bin
ispartof: Applied Mechanics and Materials, 2013-01-11, Vol.273, p.555-559
description: The development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.
language: eng
source:
identifier: ISSN: 1660-9336
fulltext: no_fulltext
issn:
  • 1660-9336
  • 1662-7482
  • 1662-7482
url: Link


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notesSelected, peer reviewed papers from the 2nd International Conference on Innovation Manufacturing and Engineering Management (IMEM 2012), December 14-16, 2012, Chongqing, China
abstractThe development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.
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