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Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever

A kind of double-layer Si-based microcantilever was fabricated using standard integrated circuit and micro-mechanical machining technology. It was thermally-excited and the signal was detected based on piezoresistance effect of semiconductors. Taking the advantage of FPGA, the digital closed-loop sy... Full description

Journal Title: Key engineering materials 2011-06-30, Vol.483, p.117-121
Main Author: Li, Ju Ping
Other Authors: Liu, Shi Bin , Liu, Yu Xin , Guo, Bo , Feng, Wen Guang , Liang, Jin Tao
Format: Electronic Article Electronic Article
Language: English
Subjects:
Quelle: Alma/SFX Local Collection
ID: ISSN: 1013-9826
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recordid: cdi_proquest_miscellaneous_963848241
title: Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever
format: Article
creator:
  • Li, Ju Ping
  • Liu, Shi Bin
  • Liu, Yu Xin
  • Guo, Bo
  • Feng, Wen Guang
  • Liang, Jin Tao
subjects:
  • Amplitudes
  • Bias
  • Electric potential
  • Excitation
  • Resonant frequencies
  • Semiconductors
  • Silicon
  • Voltage
ispartof: Key engineering materials, 2011-06-30, Vol.483, p.117-121
description: A kind of double-layer Si-based microcantilever was fabricated using standard integrated circuit and micro-mechanical machining technology. It was thermally-excited and the signal was detected based on piezoresistance effect of semiconductors. Taking the advantage of FPGA, the digital closed-loop system on silicon resonant microcantilever was implemented. On this basis, the resonant characteristics like amplitude of output signal, the resonant frequency shift, the frequency stability and the quality factor of this kind of microcantilever were studied through theoretical analysis and experiment. This paper focus on the dependence of amplitude of output signal on the exciting power, bias voltage as well as the dependence of resonant frequency shift of output signal on the exciting voltage, bias voltage. Analysis about the result of the experiment was given, which showed that this silicon microcantilever is suitable for resonant microsensor, and provided some advices for the optimum design of the system. It laid the foundation for the development of a new resonant structure of silicon micro-cantilever sensors.
language: eng
source: Alma/SFX Local Collection
identifier: ISSN: 1013-9826
fulltext: fulltext
issn:
  • 1013-9826
  • 1662-9795
  • 1662-9795
url: Link


@attributes
NO1
SEARCH_ENGINEprimo_central_multiple_fe
SEARCH_ENGINE_TYPEPrimo Central Search Engine
RANK2.116105
LOCALfalse
PrimoNMBib
record
control
sourceidproquest_cross
recordidTN_cdi_proquest_miscellaneous_963848241
sourceformatXML
sourcesystemPC
sourcerecordid963848241
originalsourceidFETCH-LOGICAL-c2057-ebe7a8d8ae618327cc2680b502dda697ebd801c35c079de19a7109ac415ac9433
addsrcrecordideNqNkMtKAzEUhgdRsFbfYVa6mmmSuSTZiDLUC20RvKxDmpyhKdOkJqmlb2-kgltX5yz-_-OcL8uuMSprRNhkv9-XQRmw0fRGlRbiZDZdlDWrSozpSTbCbUsKTnlzmnaEq4Iz0p5nFyGsEaoww80om73FnT7kzuavEJyVNubdSnqpIngTolEhd33eDS6ALubObfPO2ejdMIDOF0Z5p1LHDPAF_jI76-UQ4Op3jrOPh-l791TMXx6fu_t5oQhqaAFLoJJpJqHFrCJUKdIytGwQ0Vq2nMJSM4RV1ShEuQbMJcWIS1XjRipeV9U4uzlyt9597iBEsTFBwTBIC24XBG8rVjNS45S8PSbTnSF46MXWm430B4GR-JEokkTxJ1EkiSJJFEmiSBIT4O4IiF7aEEGtxNrtvE3v_RfxDZHNhIQ
sourcetypeAggregation Database
isCDItrue
recordtypearticle
pqid963848241
display
typearticle
titleStudy on Resonant Characteristics of Closed-Loop Controlled Microcantilever
sourceAlma/SFX Local Collection
creatorLi, Ju Ping ; Liu, Shi Bin ; Liu, Yu Xin ; Guo, Bo ; Feng, Wen Guang ; Liang, Jin Tao
creatorcontribLi, Ju Ping ; Liu, Shi Bin ; Liu, Yu Xin ; Guo, Bo ; Feng, Wen Guang ; Liang, Jin Tao
descriptionA kind of double-layer Si-based microcantilever was fabricated using standard integrated circuit and micro-mechanical machining technology. It was thermally-excited and the signal was detected based on piezoresistance effect of semiconductors. Taking the advantage of FPGA, the digital closed-loop system on silicon resonant microcantilever was implemented. On this basis, the resonant characteristics like amplitude of output signal, the resonant frequency shift, the frequency stability and the quality factor of this kind of microcantilever were studied through theoretical analysis and experiment. This paper focus on the dependence of amplitude of output signal on the exciting power, bias voltage as well as the dependence of resonant frequency shift of output signal on the exciting voltage, bias voltage. Analysis about the result of the experiment was given, which showed that this silicon microcantilever is suitable for resonant microsensor, and provided some advices for the optimum design of the system. It laid the foundation for the development of a new resonant structure of silicon micro-cantilever sensors.
identifier
0ISSN: 1013-9826
1ISSN: 1662-9795
2EISSN: 1662-9795
3DOI: 10.4028/www.scientific.net/KEM.483.117
languageeng
subjectAmplitudes ; Bias ; Electric potential ; Excitation ; Resonant frequencies ; Semiconductors ; Silicon ; Voltage
ispartofKey engineering materials, 2011-06-30, Vol.483, p.117-121
rights2011 Trans Tech Publications Ltd
lds50peer_reviewed
citesFETCH-LOGICAL-c2057-ebe7a8d8ae618327cc2680b502dda697ebd801c35c079de19a7109ac415ac9433
links
openurl$$Topenurl_article
openurlfulltext$$Topenurlfull_article
thumbnail$$Uhttps://www.scientific.net/Image/TitleCover/1304?width=600
search
creatorcontrib
0Li, Ju Ping
1Liu, Shi Bin
2Liu, Yu Xin
3Guo, Bo
4Feng, Wen Guang
5Liang, Jin Tao
title
0Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever
1Key engineering materials
descriptionA kind of double-layer Si-based microcantilever was fabricated using standard integrated circuit and micro-mechanical machining technology. It was thermally-excited and the signal was detected based on piezoresistance effect of semiconductors. Taking the advantage of FPGA, the digital closed-loop system on silicon resonant microcantilever was implemented. On this basis, the resonant characteristics like amplitude of output signal, the resonant frequency shift, the frequency stability and the quality factor of this kind of microcantilever were studied through theoretical analysis and experiment. This paper focus on the dependence of amplitude of output signal on the exciting power, bias voltage as well as the dependence of resonant frequency shift of output signal on the exciting voltage, bias voltage. Analysis about the result of the experiment was given, which showed that this silicon microcantilever is suitable for resonant microsensor, and provided some advices for the optimum design of the system. It laid the foundation for the development of a new resonant structure of silicon micro-cantilever sensors.
subject
0Amplitudes
1Bias
2Electric potential
3Excitation
4Resonant frequencies
5Semiconductors
6Silicon
7Voltage
issn
01013-9826
11662-9795
21662-9795
fulltexttrue
rsrctypearticle
creationdate2011
recordtypearticle
recordideNqNkMtKAzEUhgdRsFbfYVa6mmmSuSTZiDLUC20RvKxDmpyhKdOkJqmlb2-kgltX5yz-_-OcL8uuMSprRNhkv9-XQRmw0fRGlRbiZDZdlDWrSozpSTbCbUsKTnlzmnaEq4Iz0p5nFyGsEaoww80om73FnT7kzuavEJyVNubdSnqpIngTolEhd33eDS6ALubObfPO2ejdMIDOF0Z5p1LHDPAF_jI76-UQ4Op3jrOPh-l791TMXx6fu_t5oQhqaAFLoJJpJqHFrCJUKdIytGwQ0Vq2nMJSM4RV1ShEuQbMJcWIS1XjRipeV9U4uzlyt9597iBEsTFBwTBIC24XBG8rVjNS45S8PSbTnSF46MXWm430B4GR-JEokkTxJ1EkiSJJFEmiSBIT4O4IiF7aEEGtxNrtvE3v_RfxDZHNhIQ
startdate20110630
enddate20110630
creator
0Li, Ju Ping
1Liu, Shi Bin
2Liu, Yu Xin
3Guo, Bo
4Feng, Wen Guang
5Liang, Jin Tao
scope
0AAYXX
1CITATION
27SR
38BQ
48FD
5JG9
sort
creationdate20110630
titleStudy on Resonant Characteristics of Closed-Loop Controlled Microcantilever
authorLi, Ju Ping ; Liu, Shi Bin ; Liu, Yu Xin ; Guo, Bo ; Feng, Wen Guang ; Liang, Jin Tao
facets
frbrtype5
frbrgroupidcdi_FETCH-LOGICAL-c2057-ebe7a8d8ae618327cc2680b502dda697ebd801c35c079de19a7109ac415ac9433
rsrctypearticles
prefilterarticles
languageeng
creationdate2011
topic
0Amplitudes
1Bias
2Electric potential
3Excitation
4Resonant frequencies
5Semiconductors
6Silicon
7Voltage
toplevel
0peer_reviewed
1online_resources
creatorcontrib
0Li, Ju Ping
1Liu, Shi Bin
2Liu, Yu Xin
3Guo, Bo
4Feng, Wen Guang
5Liang, Jin Tao
collection
0CrossRef
1Engineered Materials Abstracts
2METADEX
3Technology Research Database
4Materials Research Database
jtitleKey engineering materials
delivery
delcategoryRemote Search Resource
fulltextfulltext
addata
au
0Li, Ju Ping
1Liu, Shi Bin
2Liu, Yu Xin
3Guo, Bo
4Feng, Wen Guang
5Liang, Jin Tao
formatjournal
genrearticle
ristypeJOUR
atitleStudy on Resonant Characteristics of Closed-Loop Controlled Microcantilever
jtitleKey engineering materials
date2011-06-30
risdate2011
volume483
spage117
epage121
pages117-121
issn
01013-9826
11662-9795
eissn1662-9795
notesSelected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano Technology (CSMNT) and 2th International Conference of Chinese Society of Micro-Nano Technology, October 22-24, 2010, Xi’an, China
abstractA kind of double-layer Si-based microcantilever was fabricated using standard integrated circuit and micro-mechanical machining technology. It was thermally-excited and the signal was detected based on piezoresistance effect of semiconductors. Taking the advantage of FPGA, the digital closed-loop system on silicon resonant microcantilever was implemented. On this basis, the resonant characteristics like amplitude of output signal, the resonant frequency shift, the frequency stability and the quality factor of this kind of microcantilever were studied through theoretical analysis and experiment. This paper focus on the dependence of amplitude of output signal on the exciting power, bias voltage as well as the dependence of resonant frequency shift of output signal on the exciting voltage, bias voltage. Analysis about the result of the experiment was given, which showed that this silicon microcantilever is suitable for resonant microsensor, and provided some advices for the optimum design of the system. It laid the foundation for the development of a new resonant structure of silicon micro-cantilever sensors.
doi10.4028/www.scientific.net/KEM.483.117