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A High-Voltage Closed-Loop SC Interface for a ± 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range

A low-noise high-linearity switched capacitor interface implemented in a 0.35\mu \text {m} 3.3 V/15 V CMOS process is presented in this paper for a ±50g capacitive micro-accelerometer. The sensing element is enclosed in an optimized closed loop with proportional-integral compensation, improving the... Full description

Journal Title: IEEE Transactions on Circuits and Systems I: Regular Papers June 2017, Vol.64(6), pp.1328-1341
Main Author: Meng Zhao
Other Authors: Zhongjian Chen , Wengao Lu , Yacong Zhang , Yuze Niu , Guangyi Chen
Format: Electronic Article Electronic Article
Language: English
Subjects:
Quelle: IEEE Conference Publications
ID: ISSN: 1549-8328 ; E-ISSN: 1558-0806 ; DOI: 10.1109/TCSI.2016.2645639
Link: https://ieeexplore.ieee.org/document/7828008
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recordid: ieee_s7828008
title: A High-Voltage Closed-Loop SC Interface for a ± 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range
format: Article
creator:
  • Meng Zhao
  • Zhongjian Chen
  • Wengao Lu
  • Yacong Zhang
  • Yuze Niu
  • Guangyi Chen
subjects:
  • Sensors
  • Accelerometers
  • Linearity
  • Capacitors
  • Dynamic Range
  • Built-in Self-Test
  • Timing
  • Analogue Force Feedback
  • Capacitive Micro-Accelerometer
  • High-G
  • High-Voltage
  • Interface Circuit
  • Proportional-Integral Compensation
  • Sigma-Delta Adc
  • Switched Capacitor
  • Engineering
ispartof: IEEE Transactions on Circuits and Systems I: Regular Papers, June 2017, Vol.64(6), pp.1328-1341
description: A low-noise high-linearity switched capacitor interface implemented in a 0.35\mu \text {m} 3.3 V/15 V CMOS process is presented in this paper for a ±50g capacitive micro-accelerometer. The sensing element is enclosed in an optimized closed loop with proportional-integral compensation, improving the linearity significantly. In order to suppress the flicker noise of the front-end at the lowest cost, a novel switched capacitor PI controller combined with a charge sensitive amplifier using correlated double sampling is proposed. Furthermore, a detailed noise analysis of the proposed CSA-PIC combination with a final goal of achieving 120 dB dynamic range is also presented. The theoretical analysis is verified by the consistency between calculated results and PNoise simulation results. The sensor output can be read in analogue domain from a sample-and-hold buffer or in digital domain from a back-end 2-1 MASH \Sigma -\Delta ADC. The fabricated prototype circuit measures 11.75 mm2 and operates under 15-V and 3.3-V supplies at a sampling clock of 111 KHz. Meanwhile, a sensitivity of 99.7 mV/g is achieved with a dynamic range of 112.4 dB over a 200-Hz bandwidth. The accelerometer has a DC nonlinearity of 0.623 in the range of -18 g to +14 g measured in self-test mode and the bias instability is 200 \mu \text {g} .
language: eng
source: IEEE Conference Publications
identifier: ISSN: 1549-8328 ; E-ISSN: 1558-0806 ; DOI: 10.1109/TCSI.2016.2645639
fulltext: fulltext
issn:
  • 1549-8328
  • 15498328
  • 1558-0806
  • 15580806
url: Link


@attributes
ID369102195
RANK0.07
NO1
SEARCH_ENGINEprimo_central_multiple_fe
SEARCH_ENGINE_TYPEPrimo Central Search Engine
LOCALfalse
PrimoNMBib
record
control
sourcerecordid7828008
sourceidieee_s
recordidTN_ieee_s7828008
sourcesystemOther
dbid
06IF
16IK
26IN
397E
4AAJGR
5AASAJ
6ATWAV
7BEFXN
8BFFAM
9BGNUA
10BKEBE
11BPEOZ
12IFIPE
13IPLJI
14JAVBF
15OCL
16RIA
17RIE
display
typearticle
titleA High-Voltage Closed-Loop SC Interface for a ± 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range
creatorMeng Zhao ; Zhongjian Chen ; Wengao Lu ; Yacong Zhang ; Yuze Niu ; Guangyi Chen
ispartofIEEE Transactions on Circuits and Systems I: Regular Papers, June 2017, Vol.64(6), pp.1328-1341
identifier
subjectSensors ; Accelerometers ; Linearity ; Capacitors ; Dynamic Range ; Built-in Self-Test ; Timing ; Analogue Force Feedback ; Capacitive Micro-Accelerometer ; High-G ; High-Voltage ; Interface Circuit ; Proportional-Integral Compensation ; Sigma-Delta Adc ; Switched Capacitor ; Engineering
descriptionA low-noise high-linearity switched capacitor interface implemented in a 0.35\mu \text {m} 3.3 V/15 V CMOS process is presented in this paper for a ±50g capacitive micro-accelerometer. The sensing element is enclosed in an optimized closed loop with proportional-integral compensation, improving the linearity significantly. In order to suppress the flicker noise of the front-end at the lowest cost, a novel switched capacitor PI controller combined with a charge sensitive amplifier using correlated double sampling is proposed. Furthermore, a detailed noise analysis of the proposed CSA-PIC combination with a final goal of achieving 120 dB dynamic range is also presented. The theoretical analysis is verified by the consistency between calculated results and PNoise simulation results. The sensor output can be read in analogue domain from a sample-and-hold buffer or in digital domain from a back-end 2-1 MASH \Sigma -\Delta ADC. The fabricated prototype circuit measures 11.75 mm2 and operates under 15-V and 3.3-V supplies at a sampling clock of 111 KHz. Meanwhile, a sensitivity of 99.7 mV/g is achieved with a dynamic range of 112.4 dB over a 200-Hz bandwidth. The accelerometer has a DC nonlinearity of 0.623 in the range of -18 g to +14 g measured in self-test mode and the bias instability is 200 \mu \text {g} .
languageeng
source
0IEEE Conference Publications
1IEEE Journals & Magazines 
2IEEE Xplore
3IEEE Journals & Magazines
lds50peer_reviewed
links
openurl$$Topenurl_article
openurlfulltext$$Topenurlfull_article
backlink$$Uhttps://ieeexplore.ieee.org/document/7828008$$EView_record_in_IEEE_Xplore_(Access_to_full_text_may_be_restricted)
search
creatorcontrib
0Meng Zhao
1Zhongjian Chen
2Wengao Lu
3Yacong Zhang
4Yuze Niu
5Guangyi Chen
titleA High-Voltage Closed-Loop SC Interface for a ± 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range
description

A low-noise high-linearity switched capacitor interface implemented in a 0.35\mu \text {m} 3.3 V/15 V CMOS process is presented in this paper for a ±50g capacitive micro-accelerometer. The sensing element is enclosed in an optimized closed loop with proportional-integral compensation, improving the linearity significantly. In order to suppress the flicker noise of the front-end at the lowest cost, a novel switched capacitor PI controller combined with a charge sensitive amplifier using correlated double sampling is proposed. Furthermore, a detailed noise analysis of the proposed CSA-PIC combination with a final goal of achieving 120 dB dynamic range is also presented. The theoretical analysis is verified by the consistency between calculated results and PNoise simulation results. The sensor output can be read in analogue domain from a sample-and-hold buffer or in digital domain from a back-end 2-1 MASH \Sigma -\Delta ADC. The fabricated prototype circuit measures 11.75 mm2 and operates under 15-V and 3.3-V supplies at a sampling clock of 111 KHz. Meanwhile, a sensitivity of 99.7 mV/g is achieved with a dynamic range of 112.4 dB over a 200-Hz bandwidth. The accelerometer has a DC nonlinearity of 0.623 in the range of -18 g to +14 g measured in self-test mode and the bias instability is 200 \mu \text {g} .

subject
0Sensors
1Accelerometers
2Linearity
3Capacitors
4Dynamic Range
5Built-in Self-Test
6Timing
7Analogue Force Feedback
8Capacitive Micro-Accelerometer
9High-G
10High-Voltage
11Interface Circuit
12Proportional-Integral Compensation
13Sigma-Delta Adc
14Switched Capacitor
15Engineering
general
0English
1IEEE
210.1109/TCSI.2016.2645639
3IEEE Xplore
4IEEE Conference Publications
5IEEE Journals & Magazines 
6IEEE Journals & Magazines
sourceidieee_s
recordidieee_s7828008
issn
01549-8328
115498328
21558-0806
315580806
rsrctypearticle
creationdate2017
addtitleIEEE Transactions on Circuits and Systems I: Regular Papers
searchscope
0ieee_full
1ieee16
2ieee41
3ieee13
4ieee32
5ieee14
6ieee44
7ieee45
8ieee46
9ieee47
10ieee48
11ieee9
12ieee42
13ieee1
14ieee40
15ieee12
16ieee8
scope
0ieee_full
1ieee16
2ieee41
3ieee13
4ieee32
5ieee14
6ieee44
7ieee45
8ieee46
9ieee47
10ieee48
11ieee9
12ieee42
13ieee1
14ieee40
15ieee12
16ieee8
lsr44$$EView_record_in_IEEE_Xplore_(Access_to_full_text_may_be_restricted)
tmp01
0IEEE Conference Publications
1IEEE Journals & Magazines 
2IEEE Xplore
3IEEE Journals & Magazines
tmp02
06IF
16IK
26IN
397E
4AAJGR
5AASAJ
6ATWAV
7BEFXN
8BFFAM
9BGNUA
10BKEBE
11BPEOZ
12IFIPE
13IPLJI
14JAVBF
15OCL
16RIA
17RIE
startdate20170601
enddate20170631
lsr40IEEE Transactions on Circuits and Systems I: Regular Papers, June 2017, Vol.64 (6), pp.1328-1341
doi10.1109/TCSI.2016.2645639
citationpf 1328 pt 1341 vol 64 issue 6
lsr30VSR-Enriched:[orcidid]
sort
titleA High-Voltage Closed-Loop SC Interface for a ± 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range
authorMeng Zhao ; Zhongjian Chen ; Wengao Lu ; Yacong Zhang ; Yuze Niu ; Guangyi Chen
creationdate20170600
lso0120170600
facets
frbrgroupid-6769801773659416231
frbrtype5
newrecords20190131
languageeng
topic
0Sensors
1Accelerometers
2Linearity
3Capacitors
4Dynamic Range
5Built-in Self-Test
6Timing
7Analogue Force Feedback
8Capacitive Micro-Accelerometer
9High-G
10High-Voltage
11Interface Circuit
12Proportional-Integral Compensation
13Sigma-Delta Adc
14Switched Capacitor
15Engineering
collectionIEEE Xplore
prefilterarticles
rsrctypearticles
creatorcontrib
0Meng Zhao
1Zhongjian Chen
2Wengao Lu
3Yacong Zhang
4Yuze Niu
5Guangyi Chen
jtitleIEEE Transactions on Circuits and Systems I: Regular Papers
creationdate2017
toplevelpeer_reviewed
delivery
delcategoryRemote Search Resource
fulltextfulltext
addata
au
0Meng Zhao
1Zhongjian Chen
2Wengao Lu
3Yacong Zhang
4Yuze Niu
5Guangyi Chen
atitleA High-Voltage Closed-Loop SC Interface for a ± 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range
jtitleIEEE Transactions on Circuits and Systems I: Regular Papers
risdate201706
volume64
issue6
spage1328
epage1341
pages1328-1341
issn1549-8328
eissn1558-0806
formatjournal
genrearticle
ristypeJOUR
abstract

A low-noise high-linearity switched capacitor interface implemented in a 0.35\mu \text {m} 3.3 V/15 V CMOS process is presented in this paper for a ±50g capacitive micro-accelerometer. The sensing element is enclosed in an optimized closed loop with proportional-integral compensation, improving the linearity significantly. In order to suppress the flicker noise of the front-end at the lowest cost, a novel switched capacitor PI controller combined with a charge sensitive amplifier using correlated double sampling is proposed. Furthermore, a detailed noise analysis of the proposed CSA-PIC combination with a final goal of achieving 120 dB dynamic range is also presented. The theoretical analysis is verified by the consistency between calculated results and PNoise simulation results. The sensor output can be read in analogue domain from a sample-and-hold buffer or in digital domain from a back-end 2-1 MASH \Sigma -\Delta ADC. The fabricated prototype circuit measures 11.75 mm2 and operates under 15-V and 3.3-V supplies at a sampling clock of 111 KHz. Meanwhile, a sensitivity of 99.7 mV/g is achieved with a dynamic range of 112.4 dB over a 200-Hz bandwidth. The accelerometer has a DC nonlinearity of 0.623 in the range of -18 g to +14 g measured in self-test mode and the bias instability is 200 \mu \text {g} .

pubIEEE
doi10.1109/TCSI.2016.2645639
orcidid0000-0003-4211-5511
date2017-06