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THERMAL STABILITY AND MECHANICAL PROPERTIES OF FLUORINATED DIAMOND-LIKE CARBON COATINGS

Diamond-like carbon (DLC) coatings with variable fluorine contents were produced by a plasma-assisted chemical vapour deposition (PACVD) technique, based on a remote plasma configuration. The feed gas consisted of a mixture of C2H2 and CF4 and the fluorine percentage in the coatings was in the range... Full description

Journal Title: Surface and Coatings Technology 2013, Vol.219, pp.144-150
Main Author: Nobili, L
Other Authors: Guglielmini, A
Format: Electronic Article Electronic Article
Language: English
Subjects:
Quelle: © ProQuest LLC All rights reserved
ID: ISSN: 0257-8972
Link: http://search.proquest.com/docview/1372657100/?pq-origsite=primo
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title: THERMAL STABILITY AND MECHANICAL PROPERTIES OF FLUORINATED DIAMOND-LIKE CARBON COATINGS
format: Article
creator:
  • Nobili, L
  • Guglielmini, A
subjects:
  • Fluorine
  • Annealing
  • Residual Stress
  • Microindentation
  • Thermal Stability
  • Hardness
  • Diamond-Like Carbon Films
  • Coatings
  • Finishing (MD)
  • Surface Finishing (Ep)
  • Surface Finishing (Ed)
  • Surface Finishing (EC)
ispartof: Surface and Coatings Technology, 2013, Vol.219, pp.144-150
description: Diamond-like carbon (DLC) coatings with variable fluorine contents were produced by a plasma-assisted chemical vapour deposition (PACVD) technique, based on a remote plasma configuration. The feed gas consisted of a mixture of C2H2 and CF4 and the fluorine percentage in the coatings was in the range 0-36 at%. Competition between fluorine and hydrogen in defining the coating composition is discussed. Microindentation experiments were performed to evaluate the hardness and elastic modulus, which decreased as the fluorine content increased. A similar trend was shown by the internal stress of the coatings. Adhesion to the substrate was assessed by scratch tests and high critical load was achieved with a moderate fluorine content (12 at%). The counteracting effects of internal stress and interfacial toughness may explain this behaviour. The thermal stability of the coatings was investigated by performing annealing treatments in a vacuum furnace at 500 C for variable times....
language: eng
source: © ProQuest LLC All rights reserved
identifier: ISSN: 0257-8972
fulltext: fulltext
issn:
  • 02578972
  • 0257-8972
url: Link


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titleTHERMAL STABILITY AND MECHANICAL PROPERTIES OF FLUORINATED DIAMOND-LIKE CARBON COATINGS
creatorNobili, L ; Guglielmini, A
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ispartofSurface and Coatings Technology, 2013, Vol.219, pp.144-150
identifierISSN: 0257-8972
subjectFluorine ; Annealing ; Residual Stress ; Microindentation ; Thermal Stability ; Hardness ; Diamond-Like Carbon Films ; Coatings ; Finishing (MD) ; Surface Finishing (Ep) ; Surface Finishing (Ed) ; Surface Finishing (EC)
descriptionDiamond-like carbon (DLC) coatings with variable fluorine contents were produced by a plasma-assisted chemical vapour deposition (PACVD) technique, based on a remote plasma configuration. The feed gas consisted of a mixture of C2H2 and CF4 and the fluorine percentage in the coatings was in the range 0-36 at%. Competition between fluorine and hydrogen in defining the coating composition is discussed. Microindentation experiments were performed to evaluate the hardness and elastic modulus, which decreased as the fluorine content increased. A similar trend was shown by the internal stress of the coatings. Adhesion to the substrate was assessed by scratch tests and high critical load was achieved with a moderate fluorine content (12 at%). The counteracting effects of internal stress and interfacial toughness may explain this behaviour. The thermal stability of the coatings was investigated by performing annealing treatments in a vacuum furnace at 500 C for variable times....
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abstractDiamond-like carbon (DLC) coatings with variable fluorine contents were produced by a plasma-assisted chemical vapour deposition (PACVD) technique, based on a remote plasma configuration. The feed gas consisted of a mixture of C2H2 and CF4 and the fluorine percentage in the coatings was in the range 0-36 at%. Competition between fluorine and hydrogen in defining the coating composition is discussed. Microindentation experiments were performed to evaluate the hardness and elastic modulus, which decreased as the fluorine content increased. A similar trend was shown by the internal stress of the coatings. Adhesion to the substrate was assessed by scratch tests and high critical load was achieved with a moderate fluorine content (12 at%). The counteracting effects of internal stress and interfacial toughness may explain this behaviour. The thermal stability of the coatings was investigated by performing annealing treatments in a vacuum furnace at 500 C for variable times....
urlhttp://search.proquest.com/docview/1372657100/
date2013-01-01