schliessen

Filtern

 

Bibliotheken

Magnetized hollow cathode activated magnetron

Planar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conven... Full description

Journal Title: Applied Physics Letters Oct 12, 2015, Vol.107(15)
Main Author: Bardos, A
Format: Electronic Article Electronic Article
Language: English
Subjects:
ID: ISSN: 0003-6951 ; E-ISSN: 1077-3118
Link: http://search.proquest.com/docview/2123864632/?pq-origsite=primo
Zum Text:
SendSend as email Add to Book BagAdd to Book Bag
Staff View
recordid: proquest2123864632
title: Magnetized hollow cathode activated magnetron
format: Article
creator:
  • Bardos, A
subjects:
  • Hollow Cathodes
  • Plasmas
  • Cathode Sputtering
  • Magnetrons
ispartof: Applied Physics Letters, Oct 12, 2015, Vol.107(15)
description: Planar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conventional magnetrons at the same power. The developed arrangements enhance sputtering from the magnetron target by the high-density hollow cathode plasma and increase the number of sputtered/evaporated species. Results of the test experiments of these arrangements on a commercial planar magnetron with the Ti target are presented and their capabilities discussed.
language: eng
source:
identifier: ISSN: 0003-6951 ; E-ISSN: 1077-3118
fulltext: fulltext
issn:
  • 00036951
  • 0003-6951
  • 10773118
  • 1077-3118
url: Link


@attributes
ID139951691
RANK0.07
NO1
SEARCH_ENGINEprimo_central_multiple_fe
SEARCH_ENGINE_TYPEPrimo Central Search Engine
LOCALfalse
PrimoNMBib
record
control
sourcerecordid2123864632
sourceidproquest
recordidTN_proquest2123864632
sourcesystemPC
pqid2123864632
display
typearticle
titleMagnetized hollow cathode activated magnetron
creatorBardos, A
ispartofApplied Physics Letters, Oct 12, 2015, Vol.107(15)
identifierISSN: 0003-6951 ; E-ISSN: 1077-3118
subjectHollow Cathodes ; Plasmas ; Cathode Sputtering ; Magnetrons
descriptionPlanar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conventional magnetrons at the same power. The developed arrangements enhance sputtering from the magnetron target by the high-density hollow cathode plasma and increase the number of sputtered/evaporated species. Results of the test experiments of these arrangements on a commercial planar magnetron with the Ti target are presented and their capabilities discussed.
languageeng
source
version4
lds50peer_reviewed
links
openurl$$Topenurl_article
openurlfulltext$$Topenurlfull_article
backlink$$Uhttp://search.proquest.com/docview/2123864632/?pq-origsite=primo$$EView_record_in_ProQuest_(subscribers_only)
search
creatorcontribBardos, A
titleMagnetized hollow cathode activated magnetron
descriptionPlanar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conventional magnetrons at the same power. The developed arrangements enhance sputtering from the magnetron target by the high-density hollow cathode plasma and increase the number of sputtered/evaporated species. Results of the test experiments of these arrangements on a commercial planar magnetron with the Ti target are presented and their capabilities discussed.
subject
0Hollow Cathodes
1Plasmas
2Cathode Sputtering
3Magnetrons
general
0English
1American Institute of Physics
2Aerospace Database
3Advanced Technologies Database with Aerospace
4Technology Research Database
5ProQuest Advanced Technologies & Aerospace Collection
6ProQuest Technology Collection
7ProQuest SciTech Collection
8Advanced Technologies & Aerospace Database
9SciTech Premium Collection
10Technology Collection
sourceidproquest
recordidproquest2123864632
issn
000036951
10003-6951
210773118
31077-3118
rsrctypearticle
creationdate2015
addtitleApplied Physics Letters
searchscope
01007416
11008875
210000012
310000015
410000022
510000045
610000053
710000120
810000195
910000203
1010000209
1110000233
1210000260
1310000265
14proquest
scope
01007416
11008875
210000012
310000015
410000022
510000045
610000053
710000120
810000195
910000203
1010000209
1110000233
1210000260
1310000265
14proquest
lsr43
01007416false
11008875false
210000012false
310000015false
410000022false
510000045false
610000053false
710000120false
810000195false
910000203false
1010000209false
1110000233false
1210000260false
1310000265false
startdate20151012
enddate20151012
citationvol 107 issue 15
lsr30VSR-Enriched:[doi, pqid]
sort
titleMagnetized hollow cathode activated magnetron
authorBardos, A
creationdate20151012
lso0120151012
facets
frbrgroupid4256522143849285629
frbrtype5
newrecords20181025
languageeng
creationdate2015
topic
0Hollow Cathodes
1Plasmas
2Cathode Sputtering
3Magnetrons
collection
0Aerospace Database
1Advanced Technologies Database with Aerospace
2Technology Research Database
3ProQuest Advanced Technologies & Aerospace Collection
4ProQuest Technology Collection
5ProQuest SciTech Collection
6Advanced Technologies & Aerospace Database
7SciTech Premium Collection
8Technology Collection
prefilterarticles
rsrctypearticles
creatorcontribBardos, A
jtitleApplied Physics Letters
toplevelpeer_reviewed
delivery
delcategoryRemote Search Resource
fulltextfulltext
addata
aulastBardos
aufirstA
auBardos, A
atitleMagnetized hollow cathode activated magnetron
jtitleApplied Physics Letters
risdate20151012
volume107
issue15
issn0003-6951
eissn1077-3118
formatjournal
genrearticle
ristypeJOUR
abstractPlanar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conventional magnetrons at the same power. The developed arrangements enhance sputtering from the magnetron target by the high-density hollow cathode plasma and increase the number of sputtered/evaporated species. Results of the test experiments of these arrangements on a commercial planar magnetron with the Ti target are presented and their capabilities discussed.
copMelville
pubAmerican Institute of Physics
urlhttp://search.proquest.com/docview/2123864632/
doi10.1063/1.4933091
date2015-10-12