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Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules

Graphical abstract Highlights► Sub-20nm dimensions channels are fabricated based on conventional microfabrication techniques. ► These fabricated channels with 10mm length have been successfully filled by capillary action. ► Initial experiment result and analyses of single fluorescent Alexa molecules... Full description

Journal Title: Journal of Colloid And Interface Science 1 February 2012, Vol.367(1), pp.455-459
Main Author: Hoang, H.T.
Other Authors: Tong, H.D. , Segers-Nolten, I.M. , Tas, N.R. , Subramaniam, V. , Elwenspoek, M.C.
Format: Electronic Article Electronic Article
Language: English
Subjects:
ID: ISSN: 0021-9797 ; DOI: 10.1016/j.jcis.2011.10.001
Link: http://dx.doi.org/10.1016/j.jcis.2011.10.001
Zum Text:
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recordid: sciversesciencedirect_elsevierS0021-9797(11)01247-1
title: Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules
format: Article
creator:
  • Hoang, H.T.
  • Tong, H.D.
  • Segers-Nolten, I.M.
  • Tas, N.R.
  • Subramaniam, V.
  • Elwenspoek, M.C.
subjects:
  • Nanochannels
  • Fabrication
  • Single-Molecule
  • Confinement
ispartof: Journal of Colloid And Interface Science, 1 February 2012, Vol.367(1), pp.455-459
description: Graphical abstract Highlights► Sub-20nm dimensions channels are fabricated based on conventional microfabrication techniques. ► These fabricated channels with 10mm length have been successfully filled by capillary action. ► Initial experiment result and analyses of single fluorescent Alexa molecules at the static mode are presented. We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.
language: eng
source:
identifier: ISSN: 0021-9797 ; DOI: 10.1016/j.jcis.2011.10.001
fulltext: fulltext
issn:
  • 00219797
  • 0021-9797
url: Link


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titleWafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules
creatorHoang, H.T. ; Tong, H.D. ; Segers-Nolten, I.M. ; Tas, N.R. ; Subramaniam, V. ; Elwenspoek, M.C.
ispartofJournal of Colloid And Interface Science, 1 February 2012, Vol.367(1), pp.455-459
identifierISSN: 0021-9797 ; DOI: 10.1016/j.jcis.2011.10.001
subjectNanochannels ; Fabrication ; Single-Molecule ; Confinement
descriptionGraphical abstract Highlights► Sub-20nm dimensions channels are fabricated based on conventional microfabrication techniques. ► These fabricated channels with 10mm length have been successfully filled by capillary action. ► Initial experiment result and analyses of single fluorescent Alexa molecules at the static mode are presented. We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.
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abstractGraphical abstract Highlights► Sub-20nm dimensions channels are fabricated based on conventional microfabrication techniques. ► These fabricated channels with 10mm length have been successfully filled by capillary action. ► Initial experiment result and analyses of single fluorescent Alexa molecules at the static mode are presented. We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.
pubElsevier Inc.
doi10.1016/j.jcis.2011.10.001
eissn10957103
date2012-02-01