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Mechanisms of stress generation during bombardment of Ge with keV ions: experiments and molecular dynamics simulations / Tobias Edler, S. G. Mayr

The present contribution focuses on the phenomenology and mechanisms of stress generation in Ge thin films during keV ion bombardment. Experimentally, amorphous Ge (a-Ge) thin films were grown from vapor, and subsequently bombarded with Ar+ ions with energies of up to 3 keV. Stress generation is mon... Full description

PPN (Catalogue-ID): 583653871
Journal Title: New journal of physics
Personen: Edler, Tobias
Mayr, S. G.
Format: Article Article
Language: English
Published: 2007
Physical Description: Online-Ressource (PDF-Datei: 11 S., 2,77 MB)
11
Technische Details: Systemvoraussetzungen: Acrobat reader.
Enthaltenes Werk
Gesamtaufnahme:
In New journal of physics [Bad Honnef] : Dt. Physikalische Ges, 1999 , 9(2007), 325
ISSN: 1367-2630

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