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1.

Fundamentals of microfabrication and nanotechnology 3. ed.
by Madou, Marc J.

Publisher: Boca Raton, Fla. [u.a.], CRC Press/Taylor & Francis; Libraries: UHH HAW TUHH

2012
3.

Fundamentals of microfabrication
by Madou, Marc J.

Publisher: Boca Raton, Fla. [u.a.], CRC Press; Libraries: TUHH

1997
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